Table 3.
PLS-R Factor | ||||||
---|---|---|---|---|---|---|
Region | Cell | Type | 1 | 2 | 3 | 4 |
W1 | 0.1 mm | CAL | 95.5 | 99.5 | 99.8 | 99.9 |
TSV | 96.4 | 98.1 | 99.7 | 99.7 | ||
1 mm | CAL | 96.8 | 99.9 | 99.9 | 100 | |
TSV | 97.7 | 99.7 | 99.8 | 99.5 | ||
2 mm | CAL | 48.1 | 98.8 | 99.6 | 99.9 | |
TSV | 22.7 | 93.8 | 96.6 | 99.0 | ||
W2 | 0.1 mm | CAL | 99.4 | 99.8 | 99.9 | 100 |
TSV | 95.3 | 97.7 | 97.9 | 99.2 | ||
1 mm | CAL | - | - | - | - | |
TSV | - | - | - | - | ||
2 mm | CAL | - | - | - | - | |
TSV | - | - | - | - | ||
G1 | 0.1 mm | CAL | 96.8 | 99.2 | 99.4 | 99.6 |
TSV | 79.2 | 71.7 | 83.0 | 80.3 | ||
1 mm | CAL | 100 | 100 | 100 | 100 | |
TSV | 99.9 | 99.9 | 99.9 | 99.9 | ||
2 mm | CAL | 100 | 100 | 100 | 100 | |
TSV | 99.9 | 99.9 | 99.9 | 99.9 | ||
G2 | 0.1 mm | CAL | 99.9 | 100 | 100 | 100 |
TSV | 99.9 | 99.9 | 99.9 | 99.9 | ||
1 mm | CAL | 100 | 100 | 100 | 100 | |
TSV | 100 | 99.9 | 100 | 99.9 | ||
2 mm | CAL | 99.8 | 99.9 | 99.9 | 99.9 | |
TSV | 99.6 | 99.6 | 99.4 | 99.6 |
CAL—calibration; TSV—test set validation.