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(A) Schematic design of a typical film bulk acoustic wave resonator (FBAR), (B) Schematic diagram of solidly mounted resonator (SMR), adapted with permission from [90]. (C) (a) Image of packaged FBAR sensor designed for sensing of formaldehyde, (b) FBAR device integrated with PCB, (c) magnified image of sensor element, adapted with permission from [109].
