Table 4.
Acoustic Device | Operating Frequency (MHz) | Noise Level (Hz) | Sensitivity (ΔF/c) ΔFw (Hz/ppm)/kHz | |
---|---|---|---|---|
Ethyl Acetate | Toluene | |||
QCM | 10 | 1–5 | 0.05 | 0.097 |
SAW | 433 | 10–25 | 0.30 | 1.020 |
TFBAR | 1045 | 50,000 | 0.98 | 1.044 |
ΔF referred to frequency shift due to gas exposure; c is the concentration of gas; ΔFw is the frequency shift due to coating onto device.