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Scanning electron microscopy (SEM) images of the ion-loaded SEO-89k templates after UV/O3 treatment. The treatment durations are 0 min for (a,e); 10 min for (b,f), 30 min for (c,g); and 60 min for (d,h). Images in the first row are from samples before thermal annealing (TA), and in the second row is after TA. The scale bars are 100 nm.
