Table 1.

Chemical composition of the surface estimated basing on X-ray photoelectron spectroscopy (XPS) survey spectra.

Sample	Carbon	Fluorine	Oxygen	Nitrogen	Silicon	F/C Ratio
Atomic percent
target	29.7	70.3	-	-	-	2.4
PLD 0.13Pa	33.6	59.2	3.0	0.3	3.9	1.8
PLD 0.93Pa	33.0	63.6	2.3	0.5	0.6	1.9
PLD 1.2Pa	33.1	64.5	1.9	0.5	-	1.9
PED 0.4Pa	29.8	70.2	-	-	-	2.4
PED 0.93Pa	30.3	69.7	-	-	-	2.3
PED 1.46Pa	30.6	69.4	-	-	-	2.3