Table 1.
Method A | Method B | Method C | |
---|---|---|---|
Image Z range | 608.4 nm | 464.2 nm | 125.7 nm |
Image Rms | 65.7 nm | 38.7 nm | 18.72 nm |
Image mean roughness () | 50.0 nm | 28.0 nm | 15.0 nm |
Method A | Method B | Method C | |
---|---|---|---|
Image Z range | 608.4 nm | 464.2 nm | 125.7 nm |
Image Rms | 65.7 nm | 38.7 nm | 18.72 nm |
Image mean roughness () | 50.0 nm | 28.0 nm | 15.0 nm |