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. 2019 Oct 1;9(10):1401. doi: 10.3390/nano9101401

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© 2019 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Fabrication process of gold nanodomes. (a) Spincoating of polystyrene beads on a Si₃N₄ chip. (b) Thinning down of the polystyrene beads by oxygen plasma. (c) Etching of the nanodome pattern in Si₃N₄. (d) Removal of the remains of the polystyrene beads. (e) Gold deposition. (f) The arrows mark the gap in the gold nanodomes.