Table 14.
Particle type | Electrons | Protons | Protons |
---|---|---|---|
Incident energy | 750 keV | 5 MeV | 20 MeV |
Target size | 20 × 20 × 20 μm3 | 1 × 1 × 1 μm3 | 1 × 1 × 1 μm3 |
Particle type | Electrons | Protons | Protons |
---|---|---|---|
Incident energy | 750 keV | 5 MeV | 20 MeV |
Target size | 20 × 20 × 20 μm3 | 1 × 1 × 1 μm3 | 1 × 1 × 1 μm3 |