Table 4.

Details of designed IDC sweeping wide range of parameters.

Property	Unit	min	step	max	Comments
Fingers	#	2	1	10	Width: 1 mm Spacing: 1 mm Length: 38 mm Thickness: 200 um
Finger Width	mm	0.5	0,5	4.5	Fingers: 6 Spacing: 1 mm Length: 38 mm Thickness: 200 um
Spacing	mm	1	1	9	Fingers: 6 Width: 1 mm Length: 38 mm Thickness: 200 um
Finger Length	mm	20	5	60	Fingers: 6 Width: 1 mm Spacing: 1mm Thickness: 200 um
Thickness	um	100	50	500	Fingers: 6 Width: 1 mm Spacing: 1 mm Length: 38 mm