Table 5.
Details of designed spirals sweeping wide range of parameters.
| Property | Unit | min | step | max | Comments |
|---|---|---|---|---|---|
| Number of Turns | # | 3 | 1 | 11 |
Width: 1.2 mm Spacing: 0.8 mm Inner Space: 15.5 mm Thickness: 200 um |
| Spacing | mm | 0.8 | 0.2 | 2.4 |
Width: 1.2 mm # of Turns: 3 Inner Space: 15.5 mm Thickness: 200 um |
| Width | mm | 1 | 0.2 | 2.6 |
Spacing: 0.8 # of Turns: 3 Inner Space: 15.5 mm Thickness: 200 um |
| Inner Space | mm | 13 | 2.5 | 35.5 |
Spacing: 0.8 # of Turns: 3 Width: 1.2mm Thickness: 200um |
| Thickness | um | 13 | 2.5 | 35.5 |
Spacing: 0.8 # of Turns: 3 Width: 1.2mm Inner Space: 15.5 mm |