Table 1.

CGA parameters for the two SiN grating design combinations.

Design	fu	${\mathit{f}}_{\mathit{s}}^{\mathit{c}}$	${\mathit{f}}_{\mathit{e}}^{\mathit{c}}$	n	m	tBOX (μm)	te (nm)	λmax (nm)	Λ (μm)	θ (deg)	${\mathit{f}}_{\mathit{e}}^{\mathit{c}}$Λ (nm)
A	0.55	0.5	0.15	3	19	1.92	280	1550	0.95	3°	142
B	0.55	0.5	0.15	1	19	1.56	400	1560	0.99	3°	148