Table 2.
tSiN (nm) | Air cladding | SiO2 cladding | ||||||||||
---|---|---|---|---|---|---|---|---|---|---|---|---|
Peak Coupling (dB) | Bandwidth-δλ1dB (nm) | Peak Coupling (dB) | Bandwidth-δλ1dB (nm) | |||||||||
Si sub | 2 DBR | 4 DBR | Si sub | 2 DBR | 4 DBR | Si sub | 2 DBR | 4 DBR | Si sub | 2 DBR | 4 DBR | |
300 | −3.4 | −0.66 | −0.56 | 27 | 35 | 36 | −3.0 | −0.56 | −0.48 | 32 | 44 | 45 |
40 | −2.2 | −0.56 | −0.5 | 33 | 39 | 40 | −2.5 | −0.38 | −0.31 | 35 | 42 | 43 |
500 | −1.47 | −0.5 | −0.46 | 31 | 33 | 33 | −2.4 | −0.33 | −0.26 | 33 | 43 | 43 |
600 | −1.2 | −0.5 | −0.48 | 24 | 26 | 26 | −3.13 | −0.36 | −0.28 | 26 | 38 | 39 |
700 | −1.65 | −0.5 | −0.46 | 22 | 23 | 23 | −2.8 | −0.46 | −0.36 | 20 | 30 | 30 |
The figures are provided for 3 cases which are gratings with a bare Si substrate at optimal BOX height (Si sub), and those with a 2 and 4 layer DBR stack.