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. 2019 Dec 11;9:18815. doi: 10.1038/s41598-019-55093-y

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© The Author(s) 2019

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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SEM micrographs of the Ti nanostructures created using different values of RF power: (a,b) 100 W, (c,d) 200 W, (e,f) 300 W. The left sub-figures were taken from the top view while the right sub-figures were taken at 35° tilted view. Other etching conditions: Δt 20 min, Cl₂ 30 sccm, Ar 2.5 sccm, T 20 °C, p 0.02 mbar and P_ICP 600 W. Insets show a droplet of water on the black Ti surface. The scale bar is 1 µm. (g) The length and wettability of the Ti nanostructures as a function of P_RF.