Table 1.
Symbol | Process Parameter | Level 1 | Level 2 | Level 3 |
---|---|---|---|---|
A | Application voltage (kV) | 6.5 | 7.5 | 8.5 |
B | CAPJ-sample distance (mm) | 10 | 20 | 30 |
C | Ar gas flow rate (sccm) | 0 | 200 | 500 |
D | CAPJ treatment time (s) | 60 | 180 | 300 |
Symbol | Process Parameter | Level 1 | Level 2 | Level 3 |
---|---|---|---|---|
A | Application voltage (kV) | 6.5 | 7.5 | 8.5 |
B | CAPJ-sample distance (mm) | 10 | 20 | 30 |
C | Ar gas flow rate (sccm) | 0 | 200 | 500 |
D | CAPJ treatment time (s) | 60 | 180 | 300 |