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The Taguchi L9 sample designation and detailed CAPJ parameters.
| Sample Designation | S1 | S2 | S3 | S4 | S5 | S6 | S7 | S8 | S9 | |
|---|---|---|---|---|---|---|---|---|---|---|
| CAPJ conditions | A (kV) | 6.5 | 6.5 | 6.5 | 7.5 | 7.5 | 7.5 | 8.5 | 8.5 | 8.5 |
| B (mm) | 10 | 20 | 30 | 10 | 20 | 30 | 10 | 20 | 30 | |
| C (sccm) | 0 | 200 | 500 | 200 | 500 | 0 | 500 | 0 | 200 | |
| D (s) | 60 | 180 | 300 | 300 | 60 | 180 | 180 | 300 | 60 | |
