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Parameters of fabricated 230 MHz and 1.1 GHz CMRs with various anchor designs and bottom electrode coverage rates.
| 230 MHz CMRs | 1.1 GHz CMRs | |||||
|---|---|---|---|---|---|---|
| Type | Anchor Length (La) | Width (Wa) | Bottom Electrode Coverage | Type | Resonator Length (L) | Bottom Electrode Coverage |
| A B C D |
10 μm 10 μm 20 μm 20 μm |
10 μm 20 μm 10 μm 20 μm |
33%, 50%, 75%, 100%, 120% |
G E F |
60 μm 80 μm 100 μm |
50%, 75%, 100%, 120% |
