Table 1.
Cycle | Freezing | Primary Drying | Secondary Drying | |||||
---|---|---|---|---|---|---|---|---|
Ramp (°C/min) | Ts (°C) | pc (mTorr) | Ramp (°C/min) | Ts (°C) | Hold Time (min) | Pressure (mTorr) | ||
0 | Ramp 0.3 °C/min Temp. −35 °C Hold 180 min | 0.2 | −10 | 100 | 0.2 | +25 | 360 | 100 |
1 | 0.2 | +10 | 100 | 0.2 | +25 | 360 | 100 | |
2 | 0.2 | +30 | 100 | 0.2 | +40 | 360 | 100 | |
3 | 1.0 | +30 | 100 | 0.2 | +40 | 360 | 100 | |
4 | 0.2 | +30 | 155 | 0.2 | +40 | 360 | 155 | |
5 | 0.2 | +30 | 100 | - |
Ts: shelf temperature, pc: chamber pressure.