Table 2.

Preparation of different photoresist formulations. All formulations are listed as weight percentages. After mixing all components, mix on a bottle roller until all resin is dissolved. Note that photoresist resins are inhalation hazards and a respirator should always be worn when handling, especially outside a fume hood. Suggested processing parameters for various feature heights are often provided by the photoresist manufacturer.

Formulation	Layer Thickness (μm)	Resin (wt %)	γ-Butyrolactone (wt %)	Photoinitiator (wt %)
1002F 10	10 – 30	49	46.1	4.9
1002F 50	25 – 100	61	32.9	6.1
1002F 100	100 – 200	64	29.6	6.4
SU-8 5	5 – 15	52	43.0	5.0
SU-8 10	10 – 30	59	36.0	5.0
SU-8 25	15 – 40	63	32.0	5.0
SU-8 50	40 – 100	69	26.0	5.0
SU-8 100	100 – 250	73	22.0	5.0