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. 2019 Oct 23;6(12):3132–3141. doi: 10.1021/acsphotonics.9b01196

Figure 3.

Figure 3

Demonstration of the versatility of grayscale MSFAs through patterned design variety. (a) Optical micrograph (with magnified inset) of the University of Cambridge logo text composed of 10 μm pixels with a randomized exposure dose profile, hence random colors in transmission. (b) RGB+NIR MSFA (bands labeled in inset) with (i) optical micrograph in transmission and (ii) respective transmission spectra of the wavelength bands. (c) Photograph of three identically processed chips with a range of patterned designs on each chip with varying complexity. Each chip is processed in a single lithographic step in G-EBL. (d) Spectrally “ordered” 4 × 3 mosaic: (i) optical micrograph; (ii) transmission spectra. (e) 25 μm linearly variable filter pixel design: (i) optical micrograph; (ii) AFM micrograph of the unit cell showing the in-plane height variation. (f) Optical micrograph (with magnified inset) of an array of RGB pixels with exponentially (2–n) decreasing pixel width, starting from 10 μm. (g) 25 μm discrete spiral phase pixel design: (i) optical micrograph; (ii) AFM micrograph. Transmission spectra represent averages of five different acquisitions, taken at random positions across the array.