Figure 1.

Silicon nanopore membranes are produced using semiconductor manufacturing techniques to achieve superior hydraulic permeability and molecular selectivity. (A) An optical image of a flat-sheet silicon nanopore membrane specimen. (B) A top-view scanning electron microscope image showing parallel slit–shaped pores on membrane surface. (C) A cross-section scanning electron microscope image showing sub-0.5 µm thin membrane with two sub-10 nm wide pores. Modified from reference 19, with permission.