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. 2019 Nov 21;10(12):799. doi: 10.3390/mi10120799

Figure 4.

Figure 4

(a) SEM micrograph of a W-C 30-nm thick Cryo-deposit irradiated with a 4.21 μC/cm2 dose (unoptimized dose); (b) SEM micrograph of a W-C 30-nm thick Cryo-deposit irradiated with a 35.7 μC/cm2 dose (optimized dose); (c) SEM micrograph of a W-C Cryo-deposit array, composed of 100 rectangles of 4 μm2 x 3.85 μm2 in size, grown in a single Ga+ irradiation exposure using an irradiation dose of 50 μC/cm2, amounting to a total irradiation time of 85 s (compared with 14 h using RT FIBID). Adapted and reprinted from Córdoba et al., Scientific Reports 2019 [55].