Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Comparison of charge-particle-based lithography techniques in terms of the required charge dose per area and the process complexity. The single-step or multi-step character of the technique is considered a means to classify it as a process with less or more complexity, respectively. Cryo-FIBID requires the lowest charge dose amongst the single-step techniques.
