Table 2.
Parameters used for both bulge test and finite element method (FEM) calculations.
| Parameters | Values |
|---|---|
| A (Pa/m) | 3.0 × 108 |
| B (Pa/m3) | 4.6 × 1017 |
| Density (kg/m3) | 3210 |
| Poisson’s ratio | 0.25 |
| Membrane radius (µm) | 2250 |
| Membrane thickness (µm) | 8.8 |
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