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. 2020 Jan 10;11:209. doi: 10.1038/s41467-019-14054-9

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 5 — a Capacitance response of GIA-based micro-sensors with different sizes (square: 50 μm × 50 μm, 100 μm × 100 μm, and 200 μm × 200 μm) at the pressure of 10 kPa. b GIA-based micro sensor array (6 × 6 pixels) with circular sensing pixels. At right is the micro-electrode (pixel diameter, 60 μm; pixel spacing, 150 μm). c, d Pressure distribution mapping of the micro-sensor array in the shapes of c a rectangle and d a triangle (50 kPa).