Table 1. Key characteristics of the two sensor prototypes P16LM and P24SM as determined from the flow benchmark measurements.

	P16LM	P24SM
range	−35 L/min …35 L/min	−167 L/min … 167 L/min
sensitivity	4.2 mV/Lmin−1	1.8 mV/Lmin−1
resolution	0.070 L/min	0.163 L/min
nonlinearity (max)	1.8%	1.9%
spread (med)	2.0%	1.7%
noise	0.83 mVrms	0.83 mVrms
sample rate (avg)	60.2 Hz	60.2 Hz
power consumption	1.3 mW	1.3 mW