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Energy-Dispersive X-ray Spectroscopy Analysis of Atomic Surface Composition of SiON, SiONP1, and SiONP2 Coating
| Sample | Si (at %) | O (at %) | N (at %) | P (at %) | P/N |
|---|---|---|---|---|---|
| SiON | 52.5 | 35.1 | 12.3 | 0 | 0 |
| SiONP1 | 61.8 | 7.3 | 30.5 | 0.28 | 0.9 |
| SiONP2 | 58.7 | 14.2 | 26.8 | 0.27 | 1.0 |
SiONP, silicon oxynitrophosphide.
