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. 2020 Jan 28;10:1293. doi: 10.1038/s41598-020-57538-1

Figure 4.

Figure 4

Sensitivity and Losses of the MI waveguide versus: (a) HIL refractive index with hHIL = 250 nm at λ = 4 µm and (b) Si3N4 thickness (hHIL) at λ = 4.5 µm.