Table 1.

Specifications of the miniature pressure sensor.

Parameters	Values	Units
Diaphragm size	100 × 100	μm
Chip size	1600 × 650 × 104	μm
Sensitivity	36	μV/(V∙kPa)
Nonlinearity	0.141	% FSO
Hysteresis	0.476	% FSO
TCO (34–42 °C)	8.11 × 10−4	FSO/°C
TCS (34–42 °C)	1.03 × 10−3	FSO/°C
TCO (25–95 °C)	0.186 × 10−4	FSO/°C
TCS (25–95 °C)	4.46 × 10−3	FSO/°C