Table 2.

Comparison with other miniature pressure sensors.

Chip Size (mm)	Sensitivity (μV/(V∙kPa))	Nonlinearity (% FSO)	Reference
1.6 × 1.6 × 0.9	27.9	0.34	[22]
1.25 × 1.25 × 0.45	30	-	[23]
1.0 × 1.0 × wafer thickness	52.2	0.1	[24]
1.3 × 1.3 × 0.55	28.9	0.21	[25]
1.6 × 0.65 × 0.1	36	0.141	Fabricated sensor