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Silicon micropillars can be arranged with different topographies. Silicon micropillar arrays are perfectly vertically-aligned with a height that can be tuned in a 200–600 μm range. Specific spacing, density and morphology of the silicon pillars can be arranged by changing the mask of lithographic process. Low and high magnification of cross-sectional SEM images of aligned (A) and staggered (B) micropillar arrays. Scale bar: 50 µm.
