Figure 3.

Various mechanisms of the accelerometers and gyroscopes. (a) The schematic of a resonant accelerometer. Adapted with permission from Shin et al. [39]. (b) The schematic of a piezoelectric accelerometer with tri-axis, and its operation states under vertical acceleration and lateral acceleration. Adapted with permission from Zou et al. [43]. (c) The schematic of a piezoresistive accelerometer. Adapted with permission from Partridge et al. [46]. (d) The schematic of a 3-axis capacitive accelerometer and its sectional view. Adapted with permission from Tsai et al. [49]. (e) The schematic of a resonant disk gyroscope. Adapted with permission from Nitzan et al. [52]. (f) The schematic of a vibratory gyroscope. Adapted with permission from Giner et al. [55].