Skip to main content
. 2019 Dec 18;11(1):7. doi: 10.3390/mi11010007

Figure 4.

Figure 4

(a) Schematic of conventional capacitive MEMS microphone. (b) A no-back-plate capacitive microphone with interdigitated electrodes (IDTs) structure. Adapted with permission from Lo et al. [65]. (c) Bio-inspired piezoelectric microphone with a rectangular and a circular diaphragm. Adapted with permission from Rahaman et al. [69]. (d) Hybrid-mode microphone with a piezoelectric and a capacitive mechanism. Adapted with permission from Zhang et al. [71]. (e) Schematics of two optical microphones. Adapted with permission from Chen et al. [73].