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. 2020 Jan 16;11(1):95. doi: 10.3390/mi11010095

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© 2020 by the authors.

Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).

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Main fabrication steps and process details of the designed 3D meta-atom array based on the FIB-SID technique. (a) unfolding 2D pattern figure and (b,c) the 3D transformation figures for FIB process, (d) unfolding 2D patterning using the FIB milling function to irradiate as (a) drawing, (e,f) 3D transformation process using the FIB-SID technique to irradiate as (b,d) drawing, (g) a unit cell of unfolding 2D patterned structure which marked irradiation area of FIB-SID process as dotted line, (h) a unit cell of completed 3D meta-atom array with two coupled claws facing to each other, (i) a part of large scale 3D meta-atom array fabricated using this method. The scale bars are 2 μm for (d–f), 500 nm for (g,h) and 10 μm for (i).