Figure 15.
Application possibilities of Au/Co/SiOX multi-material, nanoactuated magnetomechanical systems (NAMMS). (a) Basic design of a Co/SiOX NAMMS device, equipped with a small Au sphere at the end of the moving Co cantilever. (b) and (c) show an SEM image and the correlated energy dispersive X-Ray analysis (EDXS) based elemental map, respectively, which demonstrate FEBID multi-material fabrication capabilities within a single 3D structure. (d–f) show potential application examples for correlated analyses concerning magnetic, mechanical, optical, and electrical properties at the nano-scale. Adapted and reprinted from Vavassori et al., Small 2016 [144].