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(a) XPS spectrum of an untreated PMMA foil. Detailed spectrum of (b) oxygen and (c) nitrogen content of plasma treated PMMA foils with different gas compositions (5 min, 1000 W, 80 °C). For the maximum oxygen content, a plasma atmosphere of 50% oxygen and 50% nitrogen is sufficient. Unlike the oxygen spectrum, in the nitrogen spectrum the highest peak is achieved by using 100% nitrogen for the plasma process.
