Fig. 1. Serial nanobeam electron diffraction scheme.

a The sample is first mapped in low-dose STEM mode over a large region (typically ≈20 µm edge length), yielding a real-space image. Crystals show up as clear features and can be identified automatically. b The beam of ≈100 nm diameter is sequentially steered to each found crystal position, and diffraction patterns are acquired at a rate of up to 1 kHz.