Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.
Etching process of vertical nanowires: (a) vertical etching with HBr/O2/He ICP etcher; (b) atomic layer etching: cyclic self-limited oxidation and selective etching of SiGe oxides achieve atomic layer etching accuracy; (c) vertical SiGe nanowires with nanometer diameter formed by multiple cycle etching.
