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SEM images of fs-LIPSSs and nano/microstructures at the fluence of (a) F = 0.20 J/cm2 and (b-c) F = 2.4 J/cm2 at normal incidence, respectively. 3D optical images of the Au surface with (d) fs-LIPSSs and (e) spherical nanostructures, respectively. (f) Cross-sectional line profile of the modulation depth for the structure.
