TABLE I.
Summary of the comparative transistor performance of ML MoS2 FETs with Ti and Pd contacts before and after the p-doping. Average of ca. 10 samples.31
| Mobility (cm2 V−1 s−1) |
||||||
|---|---|---|---|---|---|---|
| Contacts | Treatment | Electron | Hole | ION/OFF | VT, avg (V) | ΦSB (meV) |
| Ti | Pristine | 12.2 ± 1.7 | ... | 107 | −54 ± 3 | 100a |
| 10 min p-doped | 0.84 ± 0.10 | 6.0 × 10−5 | 106 | 0 ± 7 | ... | |
| 1 h p-doped | 0.017 ± 0.009 | 9.3 × 10 −6 | 104 | ... | ... | |
| Pd | Pristine | 8.3 ± 0.9 | ... | 106 | −25 ± 4 | 230a |
| 10 min p-doped | 1.4 × 10−3 | 2.3 ± 0.7 | 106 | 40 ± 5 | ... | |
| 1 h p-doped | 7.4 × 10−4 | 0.82 ± 0.12 | 105 | 75 ± 3 | 156b | |
For electron transportation.
For hole transportation.