Figure 1.
(a) Schematic of multiscan (top) and halfscan (bottom) laser writing methods. Arrow shows the laser moving direction. For the halfscan schematic, colours denote different writing order (blue-red-green-black). (b) Microscope image of Bessel beam written waveguide cross sections with multiscan (left) and halfscan (right) methods. Both waveguides have a minor step of 0.2 μm and the halfscanned waveguide has a major step of 1.6 μm. Both waveguides have widths (in x direction) of 20 μm and are written with a laser pulse energy of 0.65 μJ and pulse density of 105 pulses/mm. (c) Top view (-z direction) retardance measurement of waveguides in (b).