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Table 2.
AMSEs of waveguide stress symmetry.
| 90 mW | 110 mW | 130 mW | |
|---|---|---|---|
| Multiscan | 2.75 nm2 | 14.02 nm2 | 19.85 nm2 |
| Halfscan | 0.48 nm2 | 0.32 nm2 | 2.12 nm2 |