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| Nominal | Simulation | |
|---|---|---|
| Period D x, y (µm) | 1 | 1 |
| Column height d (nm) | 25 | 24 |
| Column width (nm) | 300 | 300 |
| Effective surface thickness d t (nm) | – | 0 |
| Effective edge thickness d s (nm) | – | 1.3 |
| Column density ρCr (g cm−3) | 7.19 | 7.2 |
Substrate density  (g cm−3) |
2.65 | 2.4 |
