| Common parameters | Range | Full-step resolution | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Reflection angle (horizontal/side-bouncing) | ≥175° | |||||||||
| Lateral translation (lateral leg drives) | ±5 mm | 0.025 µm | ||||||||
| Height translation (vertical leg drives) | ±5 mm | 0.025 µm | ||||||||
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