Table 3.

Point spread functions (PSF) from n = 3 independent measurements at each z position.

Z position (ETL) [µm]	PSFX [µm]	PSFZ [µm]
18	0.43, 0.42, 0.42	1.98, 2.02, 2.05
0	0.39, 0.37, 0.38	1.78, 1.69, 1.70
−18	0.35, 0.33, 0.38	1.56, 1.62, 1.67