Skip to main content
. 2020 Feb 22;20(4):1205. doi: 10.3390/s20041205

Table 2.

HV transmitter performance summary and comparisons.

Parameter This Work [13] (2019) [21] (2017) [3] (2016) [16] (2016)
Process technology 0.13 μm HV CMOS 0.18 μm CMOS 0.18 μm HV BCD8-SOI 0.18 μm HV CMOS TSMC 0.18 μm HV CMOS
Transducer PMUT PMUT CMUT PMUT CMUT
Pulsed output voltage (V) 32 5/13.2 100 24 30
Nominal operation frequency (MHz) 3 5 10 14 5
Nominal load capacitance (pF) 1.2 N/A 9.2 2 2
Area (mm2) 0.013 N/A 0.09 1 0.017 1 0.016
Rise time (ns) 2.9 N/A 14 10.56 2 6.6
FOMTX (mA/mm2) 1018 - 730 267 568

1 These areas were estimated using a chip micrograph. 2 Obtained as trise = 2.2RCL, where R = Vmax/Imax.