Table 2.
Parameter | This Work | [13] (2019) | [21] (2017) | [3] (2016) | [16] (2016) |
---|---|---|---|---|---|
Process technology | 0.13 μm HV CMOS | 0.18 μm CMOS | 0.18 μm HV BCD8-SOI | 0.18 μm HV CMOS | TSMC 0.18 μm HV CMOS |
Transducer | PMUT | PMUT | CMUT | PMUT | CMUT |
Pulsed output voltage (V) | 32 | 5/13.2 | 100 | 24 | 30 |
Nominal operation frequency (MHz) | 3 | 5 | 10 | 14 | 5 |
Nominal load capacitance (pF) | 1.2 | N/A | 9.2 | 2 | 2 |
Area (mm2) | 0.013 | N/A | 0.09 1 | 0.017 1 | 0.016 |
Rise time (ns) | 2.9 | N/A | 14 | 10.56 2 | 6.6 |
FOMTX (mA/mm2) | 1018 | - | 730 | 267 | 568 |
1 These areas were estimated using a chip micrograph. 2 Obtained as trise = 2.2RCL, where R = Vmax/Imax.