Table 3.
Parameter | This Work | [13] (2019) | [18] (2018) | [16] (2016) | [11] (2015) | [17] (2015) | |
---|---|---|---|---|---|---|---|
Topology | VA | CSA | VA | CFVA | TIA | VA | CFVA |
Process technology | 0.13 μm HV CMOS | 0.13 μm HV CMOS | 0.18 μm CMOS | 0.18 μm HV-BCD | TSMC 0.18 μm HV CMOS | 0.18 μm HV CMOS | 0.18 μm CMOS |
Transducer | PMUT | PMUT | PMUT | PZT | CMUT | PMUT | PZT |
Power supply (V) | 1.5 | 1.5 | 1.5 | 1.8 | 1.8 | 1.8 | 1.8 |
Power consumption (mW) | 0.3 | 0.3 | 0.08 | 0.79 | 1.4 | N/A | 0.135 |
Area (10−4 mm2) | 6 | 9 | N/A | 30 1 | 280 | 310 | 60 |
Voltage–voltage gain (dB) | 21.8 | N/A | 29/30/42/53 2 | 18 | N/A | N/A | −12/6/24 |
Transimpedance gain (dBΩ) | 109.22 at 3 MHz | 99.57 at 3 MHz | N/A | N/A | 116/113.5 110/104 | N/A | N/A |
Bandwidth (MHz) | 22 | N/A | 10 | 20 | 10.2/10.8 10.6/10.5 | N/A | 9.8 |
Input current noise (pA/√Hz) | 0.08 at 3 MHz | 0.15 at 3 MHz | N/A | N/A | 0.41 @ 5 MHz | N/A | N/A |
Input voltage noise (nV/√Hz) | 7.1 at 3 MHz | N/A | N/A | 7.9 at 5 MHz | N/A | 11 at 0.22 MHz | 5.9 at 4 MHz |
Input dynamic range (dB) | 69 | 71 | 90 | 75 | N/A | N/A | 81 |
FOMRX_1 (MHz/V2Aµm2) | 16674 | N/A | N/A | 949 | N/A | N/A | 6633 3 |
FOMRX_2 (Hz/mA3µm2) | N/A | 4.1*109 | N/A | N/A | 0.09*109 3 | N/A | N/A |
1 This area was estimated from a chip micrograph. 2 Including a TGC amplifier as a second stage. 3 Computed considering its higher gain.