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Schematic view of the designed thin-film piezoelectric-on-silicon (TPoS) resonator. (a) 3-D side view illustration of the resonator. The right inset image shows a high-magnification view of the SOI (i.e., silicon-on-insulator) substrate. (b) Vertical view of the resonator. This new design of the resonator operating in differential-in differential-out (DIDO) configuration reduces the insertion loss and suppresses the feedthrough.
