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(a) The proposed resonator was fabricated using the MEMSCAP piezo micromachining process. (b) Illustrated cross-sectional schematic views indicated by the red dash line A–A’ show that there is a layer of oxide sandwiched between the metal transmission line and silicon layer for insulation. And the cross-sectional view schematic indicated by B–B’ illustrated in (c) shows more details about the electrodes and piezoelectric layer.
