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. 2020 Jan 21;11(2):119. doi: 10.3390/mi11020119

Figure 6.

Figure 6

(a) The resonator with the DIDO configuration was fabricated using the MEMSCAP piezo micromachining process for the investigation of the effects of the DIDO configuration. High-magnification microscope images of (b) resonator with DIDO configuration exhibit the details of the resonator and also the interdigital electrodes. (c,d) shows the scanning electron micrographs of the resonator.